Adquisición de un sistema multipropósito de depósito de capas finas por métodos de alto vacío que permita la deposición de una gran variedad de materiales, usando la técnica de sputtering. El sistema permitirá el depósito de materiales con múltiples fuentes magnetrón y con/sin gas reactivo, para poder depositar materiales compuestos y multicapas. También será capaz de depositar por evaporación térmica. El equipo debe de estar totalmente automatizado y ser reproducible de alta precisión. CONTRATO FINANCIADO POR MCIN/AEI/10.13039/501100011033 y por la Unión Europea “NextGenerationEU”/PRTR, en la Universidad Pablo de Olavide.
ClosedKey facts
- CPV Code
- 42122450 — Vacuum pumps
- Procedure
- Open procedure
- Source
- Procurement Portal
Original Tender Description
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