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Tenders

Plasma ALD

Closed

Updated October 15, 2026

Deadline
Deadline not specified
Contract Details
Category
Supplies
Reference
2023-137717
Value
€1,586,196
Location
Mainland Finland, Finland
Published
October 09, 2026
CPV Code
Project Timeline

Tender Published

October 05, 2023

View Original

Key facts

Buyer
VTT Technical Research Centre of Finland Ltd
Estimated value
€1,586,196
CPV Code
42900000 — Miscellaneous general and special-purpose machinery
Source
Finnish Procurement Portal
Budget
€1,586,196
Duration
Not specified
Location
Mainland Finland
Type
Supplies

Original Tender Description

The object of the tender is a 2-chamber Plasma Enhanced Atomic Layer Deposition Cluster with Automatic Wafer Handling (later also “Equipment” and/or "Tool") for coating of 200mm wafer substrates, or substrates that can be placed on such carrier wafers, with different metals, nitrides and oxides with process separation between metals/nitrides and oxides, and wafer handling from chamber-to-chamber and chamber-to-cassette without vacuum breaking. The object of the tender process is described in mo

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