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Tenders

ALD system

Open
Deadline
29 days left
August 11, 2026
Contract Details
Category
Other
Reference
ocds-mnwr74-57f11d62-9298-47b4-ba2c-1f6ddc1f276c
Value
€461,344
Location
DEG03, Germany
Published
July 05, 2026
CPV Code
Project Timeline

Tender Published

July 06, 2026

Deadline for Questions

August 04, 2026

Submission Deadline

August 11, 2026

Budget
€461,344
Duration
Not specified
Location
DEG03
Type
Other

Original Tender Description

Das Leibniz-Institut für Photonische Technologien e.V. schreibt für die Dünnschichtabscheidung eine Plasma-gestützte Atomlagenabscheidungsanlage (kurz: PE-ALD, engl. Plasma enhanced atomic layer deposition) aus, welche zum Abscheiden von Dünnschichten auf unterschiedlichen Substraten vom Einzelchipformat (5 x 5 mm²) bis mindestens 150 mm Wafer eingesetzt werden soll. Die zentralen Anforderungen an das System sind reproduzierbare Abscheideprozesse verschiedener leitfähiger, halbleitender und diel

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Basic Requirements

  • Company registration in EU required
  • Proven track record in similar projects
  • Financial stability documentation

Documents

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