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Multi-tube thermal process furnace (MTPF) for oxidation and LPCVD in PSI PICO cleanroom

Open
Deadline
3 days left
August 21, 2026
Contract Details
Category
Other
Reference
35864-03
Value
Not disclosed
Location
CH033, Switzerland
Published
August 10, 2026
CPV Code
Project Timeline

Tender Published

July 15, 2026

Deadline for Questions

August 14, 2026

Submission Deadline

August 21, 2026

Budget
Not disclosed
Duration
Not specified
Location
CH033
Type
Other

Original Tender Description

<p>Bei der zu beschaffende Anlage handelt es sich um einen Mehrrohr-Thermoprozessofen (MTPF), der für die Abscheidung von Materialien für Quanten-, Photonik- und Röntgenanwendungen der Gruppen in den Laboren LNQ und LXN sowie für alle Nutzer der PSI-Reinräume unerlässlich ist. Der MTPF sollte über eine horizontale Anordnung der Röhren verfügen und in der Lage sein, in einem Durchlauf bis zu 50 Wafer mit einem Durchmesser von 200 mm mit guter Gleichmäßigkeit innerhalb eines Wafers, von Wafer zu W

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Basic Requirements

  • Company registration in EU required
  • Proven track record in similar projects
  • Financial stability documentation

Documents

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